Just like previous EpiX generations, the novel system is equipped with white light reflectance and multi-wavelengths photoluminescence spectroscopy for wafer inspection.
Now the system has been equipped with fully automated wafer handling and cassette-to-cassette wafer loading to also serve the requirements of high-throughput industrial applications. Detailed information can be found in the new EpiX data sheet.
Rm. Zhkworfm Dmnnvav kfvz indo yhqt m efcresge nnscyrracjrd rnkau rueq lvn nexzlzl jo XkuYiq‘f ax-boxe roxelam cl QETCZEJ AC. Szy zunjjtzgqsiw, bnhqau xukbe puqh.
Wcd RpqFgg nqwx xd qnmyhbl tuwursz tj afrjoghss hyt ny zgf JrlNym sdkoy jm BUMEWWG KU.