After introducing its EpiX mapping station some years ago, LayTec is now bringing its newest EpiX generation to the market. The first demo unit of this novel metrology system will be displayed at LayTec‘s booth at ICMOVPE XX in Stuttgart, Germany from 10-14 July 2022.
Just like previous EpiX generations, the novel system is equipped with white light reflectance and multi-wavelengths photoluminescence spectroscopy for wafer inspection.
Now the system has been equipped with fully automated wafer handling and cassette-to-cassette wafer loading to also serve the requirements of high-throughput industrial applications. Detailed information can be found in the new EpiX data sheet.
Just like previous EpiX generations, the novel system is equipped with white light reflectance and multi-wavelengths photoluminescence spectroscopy for wafer inspection.
Now the system has been equipped with fully automated wafer handling and cassette-to-cassette wafer loading to also serve the requirements of high-throughput industrial applications. Detailed information can be found in the new EpiX data sheet.
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