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EV Group - E. Thallner GmbH Hartham 7 94152 Neuhaus, Germany http://www.evgroup.com
Contact Mr David Moreno +1 650-968-8900
Company logo of EV Group - E. Thallner GmbH
EV Group - E. Thallner GmbH

EV Group Ships Lithography System to Micronit for Lab-on-a-chip and Optical MEMS Device Production

EVG®6200 mask alignment system combines wafer bonding, photolithography and nanoimprint lithography in a single, highly flexible platform

(PresseBox) (Freiburg, Germany, )
EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has delivered an EVG®6200 semi-automated mask alignment system to Micronit, a manufacturer of lab-on-a-chip products used in life sciences applications, such as molecular diagnostics and point-of-care, as well as micro-processed glass substrates for MEMS applications. The EVG6200 system has been installed at Micronit's production facility in Enschede, The Netherlands, where it is providing direct fusion bonding, photolithography and nanoimprint lithography (NIL) processing in the production of microfluidics and other glass-based MEMS devices.

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The publisher indicated in each case (see company info by clicking on image/title or company info in the right-hand column) is solely responsible for the stories above, the event or job offer shown and for the image and audio material displayed. As a rule, the publisher is also the author of the texts and the attached image, audio and information material. The use of information published here is generally free of charge for personal information and editorial processing. Please clarify any copyright issues with the stated publisher before further use. In case of publication, please send a specimen copy to service@pressebox.de.