With the third generation of the MicroProf® tool series, FRT offers an ultra-stable platform: the completely in-house control and analysis software and more than 20 years of expertise in surface metrology form the basis. FRT's multi-sensor concept, combined with hybrid measurement technology, supports production lines all over the world.
The MicroProf® enables a wide range of measurement tasks to be performed quickly, efficiently and intuitively. As an established standard measuring instrument in modern 3D surface metrology, our customers have been using MicroProf® for many years in the semiconductor, medical and automotive industries. But they are also used in the MEMS/NANO/MST, sapphire, photovoltaics, mechanical engineering, optics and packaging technology industries. The devices are very versatile.
Whether you want to measure the topography, the total thickness or the layer thickness of your samples without contact, the versatile MicroProf® can be used universally due to the proven optical multi-sensor technology. Various optical measuring methods have been combined to form one universal tool. Depending on your requirements, the MicroProf® enables you to perform a quick overview measurement of the entire sample as well as high-resolution detailed measurements down to the sub-nanometer range. The open combinability of the sensors creates special flexibility. If required, sensors can be retrofitted quickly and easily.
The MicroProf® enables a wide range of measurement tasks to be performed quickly, efficiently and intuitively. As an established standard measuring instrument in modern 3D surface metrology, our customers have been using MicroProf® for many years in the semiconductor, medical and automotive industries. But they are also used in the MEMS/NANO/MST, sapphire, photovoltaics, mechanical engineering, optics and packaging technology industries. The devices are very versatile.
Whether you want to measure the topography, the total thickness or the layer thickness of your samples without contact, the versatile MicroProf® can be used universally due to the proven optical multi-sensor technology. Various optical measuring methods have been combined to form one universal tool. Depending on your requirements, the MicroProf® enables you to perform a quick overview measurement of the entire sample as well as high-resolution detailed measurements down to the sub-nanometer range. The open combinability of the sensors creates special flexibility. If required, sensors can be retrofitted quickly and easily.
