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Topography measurement under thermal load
FRT 3D surface metrology tools now optional with heating chamber
In this way, measurements can be carried out at a constant temperature as well as during a temperature ramp. The heating chamber is available in different sizes and is simply attached to the sample table of the MicroProf®. Additionally, the heating chamber contains a control unit to regulate the temperature as well as a glass sample cover. The latter ensures that the measuring device's sensors still work accurately, despite extreme temperature fluctuations in the heating chamber. The chamber can be cooled using different media and operated using different ambient media. Distortion of a sample based on thermal impact, as well as shape retention under the influence of defined ambient temperatures can now be determined with the help of FRT products.
This is increasingly required, especially in the area of 3D IC.
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