The optical inspection tool MicroProf® DI enables to inspect structured and unstructured wafers during the entire manufacturing process. By combining 2D inspection and metrology, the MicroProf® DI provides measurement solutions for a variety of applications, including defect inspection and wafer-level metrology.
MicroProf® DI provides the following advantages:
- reliable platform, including highly flexible software
- development and qualification of new customer processes
- modules that can be flexibly combined on the same tool platform
- covering all wafer surfaces at high throughput for efficient process control
Our defect inspection software provides effective visualization, versatile processing and fast generation of wafer maps as well as precise quantification and comprehensible documentation of defects.
The unique MicroProf® DI combines metrology and inspection in one flexible tool.
Contact us if you have any questions or visit our website.
+49 2204 84 3205