Vistec Semiconductor Systems recently launched a new option called "Parallel Control Job" for its macro inspection product line LDS3300. The software-package is available since March 2008 and increases the system utilization by up to 30%.
Systems combining multiple inspection tasks in one tool such as frontside-, backside- and edge inspection traditionally can run only one wafer lot at a time. Depending on the system configuration and inspection strategy, single modules are sitting idle without measuring a wafer, while other modules are continuously scanning wafers.
With Vistec's new released option "Parallel Job Control" for LDS3300 C, it now becomes possible to
Systems combining multiple inspection tasks in one tool such as frontside-, backside- and edge inspection traditionally can run only one wafer lot at a time. Depending on the system configuration and inspection strategy, single modules are sitting idle without measuring a wafer, while other modules are continuously scanning wafers.
With Vistec's new released option "Parallel Job Control" for LDS3300 C, it now becomes possible to
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