The launch of the new Vistec SB3050 at the Semicon Europe 2006 Show met with an enthusiastic response from the semiconductor industry, thanks to its high performance Variable Shaped Beam (VSB) capability that enables direct patterning for the 32nm technology node for R&D and prototyping.
The new electron optical column allows writing of 32nm structures (and smaller). In particular, structures - down to 16nm wide - were written in high-resolution resists.
This level of performance convinced IMS Chips in Stuttgart, Germany and the Fraunhofer Center Nanoelectronic Technologies (CNT) in Dresden, Germany. Both institutes are using SB300 series tools
The new electron optical column allows writing of 32nm structures (and smaller). In particular, structures - down to 16nm wide - were written in high-resolution resists.
This level of performance convinced IMS Chips in Stuttgart, Germany and the Fraunhofer Center Nanoelectronic Technologies (CNT) in Dresden, Germany. Both institutes are using SB300 series tools
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