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Vistec Electron Beam GmbH Ilmstrasse 4 07743 Jena, Germany http://www.vistec-semi.com
Contact Ms Heike Engstler +49 7131 2039941
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Vistec Electron Beam GmbH

CEA / Leti and Vistec start E-beam Cell Projection

(PresseBox) (Jena, Germany; Grenoble, France, )
CEA / Leti in Grenoble, France placed another order with Vistec Electron Beam GmbH in Jena, Germany for a Cell Projection (CP) upgrade of its high-end Vistec SB3054 Variable Shaped Beam system, which was delivered at the end of 2007 and successfully installed early this year.

Vistec's latest development combines both standard Variable Shaped Beam technology with the Cell Projection feature including fast filling cells for process optimization. This offers the utmost of flexibility with respect to the adaptation of the operation mode to customer-specific application requirements. The new approach is aiming at 45nm / 32nm technology node CMOS applications.

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