Nanometer Precision for Travel Ranges of up to 52 mm: The New LPS-65 Linear Positioning Stage with Piezomotor

(PresseBox) ( Eschbach, )
For the new LPS-65 positioning stage, PI miCos replaces conventional DC or stepper motors with a piezo stepping drive.

Using the piezo stepping drive principle, the linear positioning stage features a repeatability down to a few nanometers, high guiding accuracy and high holding force in a compact unit. Depending on the requirements, the LPS-65 is available with travel ranges of 13, 26 or 52 mm.

Compact with nanometer precision

The new positioning stage is 65 mm wide and only 20 mm high. Depending on the travel range, its length ranges from 80, 110 and 160 mm.

As displacement measuring system for position control, an optical linear encoder is used based on an integrated Fabry-Pérot interferometer. This measuring principle allows for an excellent resolution of 0.5 nm.

The high guiding accuracy is achieved using crossed roller bearings with guidance control. The positioning stage's holding force is 10 N, its maximum velocity amounts to 10 mm/s.

The piezo stepping drive system is self-locking; if the target position is reached or the system is switched off, the positioning unit maintains the position without current and without heat generation.

Perfect Match: Networkable Controller and Software

The compact E-861 controller allows for simple and precise operation of the linear positioning stage. It supports the different types of motion of the piezo stepping drive and is tuned to the requirements of the mechanical system. As a result of the controller's networking capability, up to 16 controllers can be driven simultaneously via one computer interface.

All parameters can be set and checked via software. For start-up and system configuration, the program PIMikroMove is included in the scope of delivery. Connection to custom software is possible via LabView drivers and DLLs.
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