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MICRO-EPSILON-MESSTECHNIK GmbH & Co. K.G. Königbacher Str. 15 94496 Ortenburg, Germany http://www.micro-epsilon.com
Contact Ms Tanja Schwarz +49 8542 168440
Company logo of MICRO-EPSILON-MESSTECHNIK GmbH & Co. K.G.
MICRO-EPSILON-MESSTECHNIK GmbH & Co. K.G.

Neues Interferometer zur hochpräzisen Wafer-Dickenmessung

(PresseBox) (Ortenburg, )
Das Weißlicht-Interferometer IMS5420-TH eröffnet neue Perspektiven in der industriellen Dickenmessung von monokristallinen Siliziumwafern. Dank der breitbandigen Superlumineszenzdiode (SLED) kann das IMS5420-TH sowohl für undotierte, dotierte sowie für hochdotierte SI-Wafer eingesetzt werden. Der Dickenmessbereich erstreckt sich von 0,05 bis zu 1,05 mm. Die messbare Dicke von Luftspalten beträgt sogar bis zu 4 mm.

Bei der Produktion von Halbleiterwafern kommt es auf höchste Präzision an. Ein wichtiger Prozessschritt ist das Läppen der Siliziumrohlinge, die dabei auf eine einheitliche Dicke gebracht werden. Um die Dicke fortlaufend zu kontrollieren, wurden die Weißlichtinterferometer der Reihe interferoMETER IMS5420 entwickelt.

Diese bestehen jeweils aus einem kompakten Sensor
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The publisher indicated in each case (see company info by clicking on image/title or company info in the right-hand column) is solely responsible for the stories above, the event or job offer shown and for the image and audio material displayed. As a rule, the publisher is also the author of the texts and the attached image, audio and information material. The use of information published here is generally free of charge for personal information and editorial processing. Please clarify any copyright issues with the stated publisher before further use. In case of publication, please send a specimen copy to service@pressebox.de.