Das Beschichtungssystem Phoebus arbeitet mit der plasmaunterstützten chemischen Gasphasenabscheidung (PECVD = Plasma Enhanced Chemical Vapour Deposition). Die PECVD-Reaktoren erreichen die gewünschten Materialqualitäten des amorphen und mikrokristallinen Siliziums mit hoher Schichtgleichmässigkeit bei gleichzeitig niedrigen Produktionskosten.
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