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Fraunhofer-Institut für Photonische Mikrosysteme (IPMS) Maria-Reiche-Str. 2 01109 Dresden, Germany https://www.ipms.fraunhofer.de
Contact Mr Dr. Michael Scholles +49 351 8823201
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Fraunhofer-Institut für Photonische Mikrosysteme (IPMS)

Fraunhofer IPMS-CNT bereitet Marktreife für neues Wafer Inspection System vor

(PresseBox) (Dresden, )
Das Fraunhofer Institut für Photonische Mikrosysteme (Fraunhofer IPMS) arbeitet ab sofort mit dem südkoreanischen Gerätehersteller NextIn zusammen. In einer einjährigen Kooperation wird im Reinraum des Center Nanoelectronic Technologies (CNT) ein neues Defekt-Inspektions-Gerät evaluiert, das die optische Detektion, die automatische Klassifizierung und die Charakterisierung von verschiedenen Defekttypen auf strukturierten Wafern (200 mm und 300 mm Größe) erlaubt.

Das Aegis I Wafer Inspection System von NextIn erlaubt die kombinierte Anwendung von Hellfeld- und Dunkelfeld-Bildgebung in einem Tool, was eine erhebliche Reduzierung von Investitionen in das Analytik-Equipment für Halbleiterproduzenten ermöglicht. Nach Abschluss der Evaluation bietet die Firma NextIn damit eine konkurrenzfähige Alternative top bls Fxsbjmjfdx tv 2g pi Uxxuubijnjizraudx bae sis saqukhbunofb Qggmx.

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The publisher indicated in each case (see company info by clicking on image/title or company info in the right-hand column) is solely responsible for the stories above, the event or job offer shown and for the image and audio material displayed. As a rule, the publisher is also the author of the texts and the attached image, audio and information material. The use of information published here is generally free of charge for personal information and editorial processing. Please clarify any copyright issues with the stated publisher before further use. In case of publication, please send a specimen copy to service@pressebox.de.