EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that worldrenowned research institute, Fraunhofer IZM-ASSID, has placed an order for two EVG temporary bonding and debonding (TB/DB) systems for thinwafer handling and processing for 3D ICs. ASSID (All Silicon System Integration Dresden), a new project group of Fraunhofer IZM, will use EVG's systems for advanced 3D waferlevel process integration flow development for Fraunhofer's industrial partners. Both EVG systems will be installed later this year at ASSID's stateoftheart facility in Dresdenthe first Fraunhofer Center with a 300mm line dedicated
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