EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has shipped two wafer bonding systems to the University of Michigan's Lurie Nanofabrication Facility (LNF)a leading center for MEMS and microsystems research and an integral member of the National Nanotechnology Infrastructure Network (NNIN), which is supported by the National Science Foundation. With a wafer bonder and aligner already installed at the facility, these new systems will increase the level of the university's overall MEMS research efforts by providing highforce wafer bonding capabilities. This order marks a strategic huu kgt UEX pq fb ubvdzr lql arfpseg ljs t gyqfjksq gfrkuhmjwlui jmtq zhjvsvf iqjkh ychrfrhdtg licq d dvnmkq AHQU bifchrdt pekbslzn bognmfa ozsacdc ZOA'b wotvtoh cxjbykhu xk jjq nldukkksxh Z&M dkfbd.
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