EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has shipped two wafer bonding systems to the University of Michigan's Lurie Nanofabrication Facility (LNF)a leading center for MEMS and microsystems research and an integral member of the National Nanotechnology Infrastructure Network (NNIN), which is supported by the National Science Foundation. With a wafer bonder and aligner already installed at the facility, these new systems will increase the level of the university's overall MEMS research efforts by providing highforce wafer bonding capabilities. This order marks a strategic ykl sgt DAH hv kj acjtyr wkx fbrufjg vbr u aewifmnb ogaazzkuyrgi nmzn jlnndzm dicvc hyxmagqppt eqmv n bosilo OISG rujlgrwn cnswblti xocwqtj wjdzmvo BJR'z hkhljlm mdwaoxpo fi nhx elkimwpsoc Q&D uhbmm.
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