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Synopsys, Powerchip and Nikon Collaborate on 42-nm Flash Memory Optimization
Proteus ProGen Models Combined with Nikon Scanner Signature Files (NSSF) Offer Increased Model Accuracy
"We expect the stepper-specific NSSF parameters can provide the additional modeling accuracy required in this highly competitive memory market," said Nelson Lai, OPC department manager for the Nano-Printing Technology Group at Powerchip, a Taiwan-based manufacturer of memory products and foundry services. "This NSSF collaboration will be instrumental in increasing yield for our unique 42-nanometer flash memory and in future designs."
"We are committed to providing regular progressions in modeling accuracy to equip our customers with the tools necessary to increase yield in highly competitive markets," said J. Tracy Weed, director of marketing for the Silicon Engineering Group at Synopsys. "Our strong collaboration with Nikon has been very effective in our drive toward sub-nanometer model accuracy by creating a more physical system."
"By incorporating proprietary Nikon scanner information into the Proteus software, customers can gain a competitive advantage through improved OPC accuracy and faster optimization time," said Toshikazu Umatate, operating officer and general manager, Development Headquarters, Precision Equipment Company, Nikon Corporation. "Through this collaboration with Synopsys we have been able to show clear benefits to our customers."
This phase of NSSF deployment is the latest milestone in an ongoing collaboration between Synopsys and Nikon to develop the required model accuracy value links between OPC software and Nikon hardware.
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