The new SEMIFLOW Ex1 Set opens a new product category of intrinsically safe ultrasonic flow sensors with control gear for non-contact liquid flow measurement on small and midsize rigid plastic tubes to ensure safe operation in hazardous areas. SEMIFLOW CO.66 PI Ex1 sensors are protected against explosion hazard by gases, vapors, and liquids according to the gas group IIB. The device protection level (EPL) is "Gb" for the use in Zone 1 according to ATEX/IECEx.
The Barrier Box ST Ex1 is used to limit the energy supplied to the SEMIFLOW flow sensors to avoid ignition according to IEC 60079-11 (ATEX/IECEx). The device provides all necessary power and data interfaces to the operators outside the Ex-Zone and allows the intrinsically safe SEMIFLOW to be used in hazardous areas with possible fire or explosion risks due to explosive gas atmospheres (Zone 1, Group IIB).
SEMIFLOW flow meters are successfully applied in different semiconductor processes
The sensors specialized for the use in hazardous areas of Zone 1 according to ATEX/IECEx are based on the successful SEMIFLOW series. With their robust industrial design, SEMIFLOW flow meters are specifically designed for highly accurate and contactless flow and volume measurement of abrasive, adherent, corrosive, and ultra-pure liquids as applied in single wafer cleaning, lithography and mixing equipment, chemical supply systems, and slurry lines. The compact sensors impress with their innovative clamp-on architecture to eliminate any risks of contamination and leakages. Hence, the flow meters can easily integrate into existing architectures without the hassle of system downtimes. SEMIFLOW sensors are available in eight different sensor sizes for a wide range of tube sizes. They are ideally suited for PFA, PTFE, and other hard plastic tubes and pipes.
SONOTEC® has been conducting business activities in non-contact ultrasonic flow measurement devices for decades
The development of SEMIFLOW sensors benefits from decades of experience in designing non-contact ultrasonic flow sensors for highly sensitive applications in biopharma as well as for medical devices with strict regulations addressing specific safety aspects. Thus, certain sensor performance features such as highly accurate real-time instantaneous flow measurements of up to 400 L/min, the implementation of a volume-totalizer, a broad range of standard industrial interfaces, and the expertise in handling a wide range of tubing properties and geometries could be successfully adopted to the SEMIFLOW sensor range.
The Barrier Box ST Ex1 is used to limit the energy supplied to the SEMIFLOW flow sensors to avoid ignition according to IEC 60079-11 (ATEX/IECEx). The device provides all necessary power and data interfaces to the operators outside the Ex-Zone and allows the intrinsically safe SEMIFLOW to be used in hazardous areas with possible fire or explosion risks due to explosive gas atmospheres (Zone 1, Group IIB).
SEMIFLOW flow meters are successfully applied in different semiconductor processes
The sensors specialized for the use in hazardous areas of Zone 1 according to ATEX/IECEx are based on the successful SEMIFLOW series. With their robust industrial design, SEMIFLOW flow meters are specifically designed for highly accurate and contactless flow and volume measurement of abrasive, adherent, corrosive, and ultra-pure liquids as applied in single wafer cleaning, lithography and mixing equipment, chemical supply systems, and slurry lines. The compact sensors impress with their innovative clamp-on architecture to eliminate any risks of contamination and leakages. Hence, the flow meters can easily integrate into existing architectures without the hassle of system downtimes. SEMIFLOW sensors are available in eight different sensor sizes for a wide range of tube sizes. They are ideally suited for PFA, PTFE, and other hard plastic tubes and pipes.
SONOTEC® has been conducting business activities in non-contact ultrasonic flow measurement devices for decades
The development of SEMIFLOW sensors benefits from decades of experience in designing non-contact ultrasonic flow sensors for highly sensitive applications in biopharma as well as for medical devices with strict regulations addressing specific safety aspects. Thus, certain sensor performance features such as highly accurate real-time instantaneous flow measurements of up to 400 L/min, the implementation of a volume-totalizer, a broad range of standard industrial interfaces, and the expertise in handling a wide range of tubing properties and geometries could be successfully adopted to the SEMIFLOW sensor range.
