As strong as the big boys

MicroProf® 100 reloaded

New surface metrology tool MicroProf 100 from FRT
(PresseBox) ( Bergisch Gladbach, )
The highly successful MicroProf® 100 from the FRT family of measuring systems sets new standards in optical metrology. Appropriately, FRT is presenting the latest generation of its globally established multi-sensor metrology tool at SEMICON Europa in Dresden, the annual international exhibition for semiconductor products, materials and services in Europe.

The oldest model in the MicroProf® series has been completely redesigned and has evolved into a true leader in its class. As a compact tabletop unit and thus the smallest member of MicroProf® multi-sensor family, the new MicroProf® 100 now also offers the full flexibility of its bigger brothers and completes FRT's MicroProf® line up.

Full flexibility thanks to multi-sensor technology

No matter whether the roughness, topography or film thickness need to be measured without contact with the samples, the new versatile MicroProf® 100 can be used universally thanks to its optical multi-sensor technology.

The integration of point sensors and a variety of area sensors now allow the user to investigate a wide range of surfaces from smooth to rough, matte to glossy and transparent. Depending on the dimensions, up to three sensors and a camera can be installed.

And it gets even better. Now, even the smallest MicroProf® can also be extended for double-sided sample inspection. This allows users to measure the top and bottom of the sample simultaneously and also determine the sample thickness during the same measurement process. If a new measurement task emerges at a later time, the FRT surface metrology tool can be flexibly upgraded at any time. The proprietary FRT software is modular and can be used to perform both manual and fully automated measurements of the sample.

With a travel range of the xy table of 150 mm x 100 mm, the new MicroProf® 100 is the ideal device to measure small parts individually in tray during production. However, the MicroProf® 100 is also popular in research and development labs because, as a tabletop device, it can be integrated almost anywhere.

Get to know the latest MicroProf® 100 from FRT at Semicon Europa in Hall 11, Stand no. 1241!
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