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Piezoelectric Micro Sensors based on aluminum nitride for Industrial Applications
Fraunhofer ENAS presents its research results on fabrication and application of aluminum nitride layers at the SENSOR+TEST in Nuremberg
At the SENSOR+TEST, Fraunhofer ENAS shows application samples for aluminum nitride-based sensor and actuator systems. The institute introduces a wake-up generator detecting mechanical events, such as acceleration or vibration, and transform the mechanical energy into electric energy by using thin aluminum nitride layers to activate a stand-by system (sleeping system). An acceleration larger than 0.08 g is needed to generate sufficient energy for the wake-up process. The wake-up generator measures inertial events with no need of any power supply. A system, consisting of ASIC and MEMS requires less than 300 nA current consumption.
This piezoelectric transducer is of great interest for industry as sensor and actuator material. To realize these industrial applications, Fraunhofer ENAS together with the Canadian company Preciseley Microtechnology Inc. and EDC Electronic Design Chemnitz GmbH has developed a piezoelectric MEMS, which was integrated as positon sensor into the high volume production of the Canadian partner. Furthermore, the project partners have realized an ASIC, which showed a fast, precise and low-noise measurement of the piezoelectric sensor signal. At the Fraunhofer pavilion, Fraunhofer ENAS demonstrates the advantages of aluminum nitride-based systems by means of a piezoelectric MOEMS. This actuator offers a high scan angle of up to 100° at a low actuation voltage of less than 20 V and is reliable during temperatures of up to 150 °C.
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