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EV Group - E. Thallner GmbH Hartham 7 94152 Neuhaus, Germany http://www.evgroup.com
Contact Ms Brandy Lee +1 650-968-8900
Company logo of EV Group - E. Thallner GmbH
EV Group - E. Thallner GmbH

EVG Unveils EVG520L3 Next-Generation Wafer Bonding System with Key Cost-of-Ownership Advantages for Advanced Packaging and MEMS Applications

New Wafer Bonder from EVG Enables 3-5x Throughput Improvement for Breakthrough Cost-of-Ownership Performance

(PresseBox) (Dresden, )
EV Group (EVG), a leading supplier of wafer-bonding and lithography equipment for the advanced semiconductor and packaging, MEMS, silicon-on-insulator (SOI) and emerging nanotechnology markets, today announced the latest addition to its industry-leading EVG500 Series of permanent wafer bonding systems. The new three-chamber EVG520L3 wafer bonding system builds on the series' proven strengths in temperature control, piston force uniformity and modularity, with the next major implementation of the bond chamber concept-addressing the need for high-vacuum, CMOS-compatible bonding processes while delivering significantly higher throughput, cost of ownership (CoO) and yields.

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