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Carl Zeiss SMT GmbH Rudolf-Eber-Str. 2 73446 Oberkochen, Germany http://www.zeiss.com/semiconductor-manufacturing-technology/en_de/home.html
Contact Mr Markus Wiederspahn +49 7364 202194
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Carl Zeiss SMT GmbH

New Chip Fabrication Technology on the Verge of Volume Production

Delivery of first optical system from Carl Zeiss joins list of positive news about EUV Lithography

(PresseBox) (Oberkochen, )
Carl Zeiss, the world's leading manufacturer of optical systems for chip fabrication, has now delivered a complete optical system for production-ready Extreme Ultraviolet Lithography (EUVL), a new technology for microchip fabrication. This optical system forms a core module of the first EUVL production system from the Dutch manufacturer and long-term partner to Carl Zeiss, ASML. Delivery of the complete EUVL system, starting at a rate of 60 wafers per hour, is planned in the second half of 2010. It is intended for production of microchips with structures in the 20 Nanometer range

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