The new thermal membrane-based flow sensor of 2E mechatronic for measuring smallest pressure differences was developed in collaboration with the HSG-IMIT, the MMA AG and the company Gruner AG.
By implementing the innovative MID-technology a considerable reduction in volume was achieved.The complete sensor can also be assembled like an SMD with standard SMTmachines. The liquid-based connectors are integrated in the MID as well.The electrical contacting between Chip and MID is realized through wire bonding.High precision is achieved by fluidic channels integrated in the silicon chip.The modular set-up allows variable measuring ranges from 0-3 mbar or 0-15 mbar respectively.
By implementing the innovative MID-technology a considerable reduction in volume was achieved.The complete sensor can also be assembled like an SMD with standard SMTmachines. The liquid-based connectors are integrated in the MID as well.The electrical contacting between Chip and MID is realized through wire bonding.High precision is achieved by fluidic channels integrated in the silicon chip.The modular set-up allows variable measuring ranges from 0-3 mbar or 0-15 mbar respectively.
