Major order for Vistec's metrology equipment
"We are proud that, despite the hard times the Semiconductor market currently faces, our customers still consider investing in Vistec's products as money well spent", says Gerhard Schlueter, Product Manager Mask Metrology of Vistec Semiconductor Systems GmbH.
Multiple tools for critical dimension and pattern placement metrology systems were already delivered to the customer in previous years. This time, one LMS IPRO4 and one LWM9045 system, which represent the most advanced tool generations of pattern placement and SEM based critical dimension measurement, were ordered respectively. These metrology systems are used to qualify the photomask lithography tools and to control the manufacturing process of photomasks of the latest technology node.
The recent purchase order contributes to a long list of more than 100 LMS pattern placement metrology systems that have been delivered since being introduced 20 years ago. The SEM-based CD measurement system in turn was launched in 2004 as a result of a joint project with Advantest Corporation of Japan. Since then, each year ten of its units were delivered. This makes the LWM9000 and its successor, the LWM9045, a well accepted standard in SEM-CD metrology for photomasks.
Vistec Semiconductor Systems GmbH
Vistec Semiconductor Systems GmbH is providing key technology used by all leading semiconductor manufacturers and many research institutes around the world. Their innovative product portfolio includes inspection systems, defect detection and classification systems and metrology systems for mask and wafer manufacturing. Their systems are used for microchip and photo mask production as well as for scientific and commercial research. In addition to the production facility in Germany, the company also maintains support centers in the USA, Japan, China, Singapore, Taiwan and Korea.
Vistec Semiconductor Systems GmbH, Weilburg is part of the Vistec Semiconductor Systems Group which consists of three business units:
- Vistec Semiconductor Systems GmbH located in Weilburg, Germany
- Vistec Electron Beam GmbH located in Jena, Germany
- Vistec Lithography Ltd. located in Watervliet, N.Y., USA