University of Toronto acquires multifunctional E-beam system from Vistec
The new EBPG5000plus system has been installed in the Wallberg Building at St. George Campus, in downtown Toronto. Vistec's EBPG5000plus excels through its flexibility and excellent lithography performance - a perfect fit for the variety of applications required by the University. "This facility is the first one of its kind in the province of Ontario and Western Canada. The possibilities to grow out of this initiative dedicated to the field of nanoscale science and engineering are almost limitless. This unique facility could be the convergence point for researchers from a number of science and engineering disciplines - demonstrating the versatility of the EBPG5000plus technology and also the multidisciplinary nature of nanotechnology research. UofT now has the technological capability to explore new design and fabrication possibilities on the nanoscale for the next-generation devices - driven by high pattern resolution and placement accuracy" says Dr. Aju Jugessur, Nanolithography Facility Manager / Senior Researcher who is leading and developing this new facility at the University of Toronto.
Applications that will benefit from the flexibility of the EBPG5000plus include: meta-materials and photonic crystals, integrated optical devices, nanophotonic devices, lab-on-chip devices, biosensors for medical applications and nano-patterning for surface functionalization for fpr protein & DNA related biological work. One immediate application plan will be academic mask making, which will allow the University to write masks for internal use according to requirements. ECTI also plans to offer its Electron Beam Lithography services to industrial users.
"The bandwidth of possible uses puts this Gaussian Beam Lithography System on top of the competition", states Erwin Mueller, Vistec's Manager of Service & Technical Support. Vistec's EBPG series is also a global leader for advanced nanolithography applications, particularly in direct writing of premium GaAs communication devices. The extraordinary flexibility of the EBPG5000plus to support a wide range of different applications makes it the ideal system for the manifold needs of the University of Toronto.
Vistec Electron Beam Lithography Group
Vistec Electron Beam Lithography Group combines Vistec Electron Beam and Vistec Lithography.
Vistec Lithography develops, manufactures and sells electron-beam lithography equipment based on Gaussian beam technology. Their electron beam systems are world-wide accepted in advanced research laboratories and universities.
Vistec Electron Beam
Vistec Electron Beam is providing electron-beam lithography equipment based on shaped beam technology, which is used by leading semiconductor manufacturers and many research institutes around the world. Their innovative electron beam systems are used for microchip production and integrated optics as well as for scientific and commercial research.
Vistec Electron Beam GmbH
The Emerging Communications Technology Institute (ECTI) is an interdisciplinary open research facility based at the Faculty of Applied Science and Engineering, in the University of Toronto. ECTI promotes collaborative research with strategic partners from academia, government and industry. It also facilitates advanced educational opportunities and information exchange events. The Institute manages and operates the Open Research Facility consisting of several state-of-the-art research labs. These Labs enable research in the areas of nanotechnology and nanofabrication, photonic materials and devices, micro- and nano-electromechanical systems (M/NEMS), biotechnology, microwave devices, micro- and nano-electronic devices, integrated optics and photovoltaic devices.