LINEX: New Inline Wet Process Equipment for Cleaning, Etching and Polishing by SINGULUS TECHNOLOGIES
The new LINEX system is an inline wet processing platform for horizontal substrate transport of solar wafers. The SINGULUS TECHNOLOGIES LINEX combines an advanced transportation system and sustainable/innovative processing modules with proven and efficient chemical treatment. In addition to proven processes, the focus is on new applications such as polish etching, emitter etching and ozone-based treatments. The highly integrated design, high throughput, high availability and low breakage rate make LINEX very attractive for solar cell manufacturers worldwide. The modular design offers inline systems for R&D purposes as well as mass production systems with fully integrated 5 lane or 10 lane concepts for capacities of 4000 wph and 8000 wph.
The LINEX inline system provides a wide range of process options. With respect to the highest flexibility in configuration, the new LINEX generation is characterized by clear modular design and compact footprint. The LINEX concept fulfils current and future requirements with regard to capacity, flexibility and stability for mass production.
SINGULUS TECHNOLOGIES at SNEC PV POWER EXPO 2017,
April 19–21, 2017 in Shanghai, Booth E3-006
SINGULUS TECHNOLOGIES AG
SINGULUS TECHNOLOGIES - Innovations for New Technologies
SINGULUS TECHNOLOGIES is an engineering company and develops and builds machines for economic and resource-efficient production processes. The range of use of the machines built by SINGULUS TECHNOLOGIES include vacuum thin-film and plasma coating, wet-chemical cleaning and etching processes as well as thermal processing technology.
For all machines, processes and applications SINGULUS TECHNOLOGIES utilizes its know-how in the areas of automation and process technology in order to provide additional, attractive work areas with innovative products next to the existing application areas of Solar, Semiconductors, Coatings and Optical Disc.
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