RASIRC Steamer Turbo Winner of Golden Gas Award

Ultrapure steam and blended gas system wins in Specialty Gas Delivery Systems category

San Diego, CA, (PresseBox) - RASIRC®, the steam purification company, announced that the Steamer Turbo has won the prestigious Golden Gas Award for innovation in specialty gas delivery. The Steamer Turbo is the first RASIRC Steamer with integrated gas blending control, solving the difficult problem of condensation when blending steam with compressed gases. Delivering high flow rates of steam combined with nitrogen or oxygen, the Steamer Turbo improves uniformity of thin wet thermal oxide films for 300mm and larger furnaces (white paper available at http://www.rasirc.com/regpages/papers.php?nn=ThinOxide). RASIRC products deliver patented ultrapure water vapor for semiconductor, photovoltaics, nanotechnology, and other manufacturing applications.

"The Steamer Turbo provides high flows of heated nitrogen with up to 50 slm of ultrapure steam like no other product and positions us to support future 450mm processes," said Jeffrey Spiegelman, RASIRC founder and president. "We are pleased to be recognized by Gases & Instrumentation magazine for the innovation and market value of this product."

The move to 450mm wafers will require much higher flow rates to maintain process uniformity. A blended gas is ideal for generating uniform thin oxides using wet thermal oxidation as well as reduced process time for batch atomic layer deposition (ALD). The Steamer Turbo also enables a unique method to deliver both energy and ultrapure water through condensation at the wafer surface. The integration of hot compressed gas provides a sweep gas to move condensed steam away from the wafer, enabling new forms of wafer cleaning.

The Golden Gas Award rates each product on its ability to solve an important challenge to the gas industry: technological innovativeness; environmental "green" attributes; and superior specifications for power, speed, maintenance, cost, and quality.

RASIRC

RASIRC products purify and deliver ultrapure liquids and gases. RASIRC steam purification technology is the first to allow ultra high purity (UHP) steam to be sourced from de-ionized water which reduces cost, increases yield, and improves safety. RASIRC vaporizers, humidifiers, and steam generators are of critical importance for many applications in the semiconductor, pharmaceutical, medical, biological, fuel cell, and power industries. Custom systems are available upon request. Call +1-858-259-1220, e-mail info@rasirc.com, or visit www.rasirc.com.

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