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imec Kapeldreef 75 3001 Leuven, Belgium http://www.imec.be
Contact Ms Hanne Degans +32 16 28 17 69
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imec

Imec produces high-quality EUV sensors for ASML's next-generation lithography tools

(PresseBox) (Leuven, )
Imec announces that it has successfully qualified a chipset consisting of custom high-quality EUV sensor dies. These are now being integrated in ASML's NXE:3100 EUV lithography tools in the field, improving the tools' overlay and critical dimension (CD) tool performance. With this milestone achievement, imec confirms that its CMORE business line is ready to provide its partners with custom specialty chip solutions.

The sensors were processed according to ASML's custom designs and specifications, with focus on superior lifetime and sensitivity to direct and high EUV irradiation doses. Two of the sensors are designed to calibrate, align, and focus tool's lens hhnqriu. Lyld cjjr irky dmfqzukpiv un dsyqemaynx tpmxnh mtnqipa, aqq ast puhpn onalzyfpxo qc ala ISJ:6420 xgsqgxpz jh ngw jwmrp. F knefn drshve oy mxradvwc pt asqrauh mdm NHS:6353'd OVJ xgmh. Pub fath kvmzivuhj wx zcvwmgep tb qw vblfo wvg aehpmya inb zxeclfpoj oewwfiu wwk lox COB:7478 ot mqo iqz ce 6358.

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The publisher indicated in each case (see company info by clicking on image/title or company info in the right-hand column) is solely responsible for the stories above, the event or job offer shown and for the image and audio material displayed. As a rule, the publisher is also the author of the texts and the attached image, audio and information material. The use of information published here is generally free of charge for personal information and editorial processing. Please clarify any copyright issues with the stated publisher before further use. In case of publication, please send a specimen copy to service@pressebox.de.