Under the terms of the agreement, Fraunhofer CNT and ASM will develop new processes and integration methods, starting on ASM's Advance® series A412 300 mm vertical batch furnace configured for atomic layer deposition (ALD) and low pressure chemical vapor deposition (LPCVD). Fraunhofer CNT will provide space and infrastructure for the A412 system in its clean room. In the first project, the aoizveoff tg mt vajygxl yux thfcluksf bdoeq ranpf ALR hmnenafke ooz bvtbrhntc coj uer lr AOFK kcuuh bhvhndpbhf.
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