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Carl Zeiss SMT GmbH Rudolf-Eber-Str. 2 73446 Oberkochen, Germany http://www.zeiss.com/semiconductor-manufacturing-technology/en_de/home.html
Contact Ms Ilka Hauswald +49 7364 209231
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Carl Zeiss SMT GmbH

Kooperation für noch feinere Strukturen von Mikrochips

Erste Erfolge beim Forschungspartner IMS CHIPS

(PresseBox) (Oberkochen, Stuttgart, )
Der Unternehmensbereich Semiconductor Manufacturing Technology von ZEISS und das Stuttgarter Institut für Mikroelektronik (IMS CHIPS) arbeiten gemeinsam an der Entwicklung nanostrukturierter optischer Komponenten. Diese erlauben es, feinere Strukturen von Mikrochips zu belichten, um diese noch kleiner, leistungsfähiger, energieeffizienter und preiswerter zu machen. Wesentliche Elemente dieser Nanometer-Optiken werden von IMS CHIPS entwickelt. Immer kleinere Strukturen erfordern jedoch immer aufwendigere und größere Geräte. Deshalb hat IMS CHIPS in einen sogenannten Elektronenstrahl-Schreiber der neuesten Generation investiert. Die Finanzierung des Hightech-Equipments war nur möglich über einen Forschungsverbund zwischen ZEISS und IMS CHIPS. Finanzielle Unterstützung leisteten sowohl das Land Baden-Württemberg als auch ZEISS.

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