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Carl Zeiss AG Carl-Zeiss-Str. 22 73447 Oberkochen, Germany http://www.zeiss.de
Contact Ms Ilka Hauswald +49 7364 209231
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Carl Zeiss AG

BMBF-Verbundprojekt zu neuartiger Chipherstelltechnologie erfolgreich beendet

Carl Zeiss liefert erste EUV-Lithografie-Optiken aus

(PresseBox) (Berlin/Oberkochen, )
Das von Carl Zeiss geführte Verbundprojekt "Lithografie für den 22-Nanometer-Knoten" ist erfolgreich abgeschlossen. In diesem nationalen Projekteingebettet in das vom niederländischen Unternehmen ASML geführte europäische EXEPT-Projekt ("Extreme UV Lithography Entry Point Technology Development") als Teil des CATRENE-Clusters - haben zwei Carl Zeiss Unternehmen und sechs weitere deutsche Firmen und Forschungseinrichtungen die EUV-Lithografie von der Grundlagenforschung zu einer voll einsetzbaren Technologie für die Serienproduktion von Mikrochips am 22-Nanometer-Knoten weiterentwickelt. Durch die EUV-Lithografie tragen Carl Zeiss und seine Partner entscheidend zum Anspruch der Halbleiterindustrie bei, Mikrochips immer kleiner, effizienter, umweltfreundlicher und preiswerter zu machen. Das Projekt wurde vom Bundesministerium für Bildung und Jtsctaheq (RZLY) kcr sglrfjqmm sryg 24 Lqeisjrba Ngur jlphdtvwk.

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The publisher indicated in each case (see company info by clicking on image/title or company info in the right-hand column) is solely responsible for the stories above, the event or job offer shown and for the image and audio material displayed. As a rule, the publisher is also the author of the texts and the attached image, audio and information material. The use of information published here is generally free of charge for personal information and editorial processing. Please clarify any copyright issues with the stated publisher before further use. In case of publication, please send a specimen copy to service@pressebox.de.