SSE has installed a fully automatic MAXIMUS 804 MICROCLUSTER SYSTEMS at microFAB in Bremen, Germany

Singen, (PresseBox) - microFAB Bremen GmbH, one of the leading MEMS Wafer Foundries worldwide providing service in the field of silicon-based micro-systems technology and a global supplier of customised Microsystems, has selected SSE to supply a flexible, fully automatic coating and developing Microcluster system MAXIMUS 804.

microFAB offers specialized MEMS process technologies and a wide range of modular options, as well as technical guidance and extensive design support.

Today, microFAB manufactures MEMS for automotive, communications, medical consumer electronics and other applications.

The installation of this SSE system assures the position of microFAB and extends the invaluable store of experience in responding to a whole host of different tasks, requirements and conditions.

The flexibility and modular set up of the SSE MAXIMUS 804 corresponds optimally to the philosophy and future plans of microFAB and features like the integrated wafer flipping allows production with a double side processing of substrate on one system platform.

For more information about microFAB please visit the web site at

The SSE MAXIMUS 804 systems are efficient lithography Micro- clusters capable of coat/bake/develop of wafers up to 200mm. SSE provides the most cost effective and productive lithographic tools, to support the MEMS industries.

Applying additional patented options to the MAXIMUS system like the closed cover technology that enables the better coating uniformity, booster arms for more throughput and flow recipe structures for multiple process run, it can be easily adapted to the process and production requirements.

solar-semi GmbH

SSE Sister Semiconductor Equipment GmbH is a global supplier of capital equipment for lithography processing of Wafers and substrates. SSE offers unique solutions based on modular system design, innovative engineering and excellent know how of production processes in clean rooms.

The product portfolio includes laboratory and automated production equipment for the coating, developing and wet processing of wafers/substrates required for the production of Sensors and MEMS for the automotive applications, Bio- and Medical applications, Nanotechnologies, Photovoltaic for space applications, Large substrates (FPD), Semiconductor and Optoelectronic.

In addition SSE designs and manufactures customized equipment for unique and improved customer applications.

In a short period of time, SSE has developed a global customer and partner base through sales offices in Europe, Asia and the USA.

For more information about SSE please visit our web site at

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