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IAF chooses AIXTRON CCS MOCVD tool for oxide based sensor development
To be used for the research and development of indium oxide (InO) based materials for sensor applications, the CCS reactor will be supplied with 1x4" wafer configuration in the fourth quarter 2008.
The IAF is collaborating with fellow European researchers to bring to commercialization room temperature gas sensors. This has been an outgrowth of its development of ultra-high brightness (UHB) III-nitride LEDs. Last year the team published their first results on the development of a single-chip ozone sensor based on indium oxide nanoparticles and blue LEDs.
"With the new AIXTRON MOCVD tool we will be able to accelerate the commercial launch of tiny sensors that could be integrated into portable devices, such as mobile phones," says Dr. Klaus Koehler, who is the Deputy Dept. Head of IAF's Epitaxy Group. He comments on the latest order: "We have long-term familiarity with the excellent AIXTRON reactor technology. It was natural to choose the CCS from AIXTRON because of its very good flexibility of susceptor configurations. The reactor's triple plenum showerhead provides for inherent growth uniformity with minimized pre-reactions. These characteristics together with high precursor efficiency make this system an ideal match for our sensor development plans."
The Fraunhofer Institute for Applied Solid-State Physics is a leading research and technology center for compound semiconductors and their application in microelectronics and optoelectronics.
For further information on AIXTRON AG (FSE: AIX, ISIN DE0005066203; NASDAQ: AIXG, ISIN US0096061041) please consult our website at: www.aixtron.com.
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