Renesas Electronics, a premier supplier of advanced semiconductor solutions, today announced its successful development of the world’s first (Note 1) split-gate metal-oxide nitride oxide silicon (SG-MONOS, Note 2) flash memory cells employing transistors with fin-shape for use in microcontrollers (MCUs) with on-chip flash memory having a circuit linewidth of 16 to 14 nanometer (nm) or finer. SG-MONOS technology is reliable for use in automotive applications and Renesas currently mass produces 40nm MCUs using this technology, and 28nm MCUs are under development. The successful development shows promising scalability of the SG-MONOS technology to 16/14nm process nodes and beyond.
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